Use this url to cite publication: https://hdl.handle.net/20.500.12259/43751
Study of hydrogen behaviour in plasma treated titanium films
Type of publication
Straipsnis konferencijos medžiagoje Web of Science duomenų bazėje / Article in conference proceedings in Web of Science database (P1a1)
Title
Study of hydrogen behaviour in plasma treated titanium films
Is part of
Radiation interaction with material and its use in technologies 2012 : 4rd international conference, Kaunas, Lithuania, May 14-17, 2012 : program and materials. Kaunas : Tecnologija, 4 (2012)
Date Issued
| Date |
|---|
2012 |
Publisher
Kaunas : Tecnologija
Extent
p. 119-122
Abstract (en)
Titanium oxide is well known, widely used and investigated material that shows unique physical and chemical properties. This paper deals with Ti thin films investigation regarding an effect of water vapour plasma immersion ion implantation technology. Samples are characterized using four probe resistivity method that shows the change of surface electrical conductivity. This parameter tells us about the formation of new phases (e.g. non-stoichiometric titanium oxide) or simply creation of possible defects which depend on presence of hydrogen.
Type of document
type::text::journal::journal article::research article
Language
Anglų / English (en)
Coverage Spatial
Lietuva / Lithuania (LT)
ISSN (of the container)
1822-508X
WOS
WOS:000308846300033
Other Identifier(s)
VDU02-000012017