Atmospheric plasma torch deposition of carbon electrodes for supercapacitors

Abstract

Double-layered carbon/NiO2electrodes have been fabricated by atmospheric plasma jet and the reactive magnetron sputter technique.Thick activated carbon coatings were deposited on stailess steel substrates using atmospheric plasma torch and argon-acetylene working gas. Thin NiO2 films were deposited on the top of the as-grown carbon layers by magnetron sputter deposition of Ni inthe oxygen atmosphere. The studies of surface morphology of fabricated electrodes was done using scanning electronic microscope (SEM) in dependence on the coating/film deposition parameters and plasma treatment conditions