standard.page.titleprefix Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment
| dc.contributor | Lietuvos standartizacijos departamentas | |
| dc.date.accessioned | 2022-05-23T08:48:32Z | |
| dc.date.available | 2022-05-23T08:48:32Z | |
| dc.date.issued | 2019-06-18 | |
| dc.date.submitted | 2024-02-22 | |
| dc.description | 81.060.30 | |
| dc.format.extent | 4 | |
| dc.identifier | ISO 21859:2019 | |
| dc.identifier.other | ISO 21859:2019 | |
| dc.identifier.uri | https://hdl.handle.net/20.500.12259/232505 | |
| dc.language.iso | en | |
| dc.rights | restricted access | |
| dc.subject | Modernioji keramika | |
| dc.subject.classification | ISO Tarptautinė standartizacijos organizacija | |
| dc.subject.other | ISO/TC 206 | |
| dc.title | Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment | |
| dcterms.identifier | 334A7BE1816F1FBE8453263135584664 | |
| dspace.entity.type | Standard | |
| localcerif.document.id | 1319559 | |
| localcerif.status | Taip / Yes | |
| oairecerif.internalid | 704449 |
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