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Use this url to cite Standard: https://hdl.handle.net/20.500.12259/232505

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment

ID
704449
Reference
ISO 21859:2019
Original Reference
ISO 21859:2019
Title
Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment
Contributor
Lietuvos standartizacijos departamentas
Date Issued
2019-06-18
Technical Committee
ISO Tarptautinė standartizacijos organizacija
Foreign Technical Committee
ISO/TC 206
Subject
NoSubject
81.060.30
Modernioji keramika
Document
DocumentLanguagePages
en
4
Active
Taip / Yes
Access Conditions
Prieiga tik registruotiems vartotojams / Access for registered users only
Date of Submission
2024-02-22