Use this url to cite publication: https://hdl.handle.net/20.500.12259/271212
Surface energy and frictional / adhesive properties of polymeric resist films
Type of publication
Straipsnis recenzuojamoje Lietuvos tarptautinės konferencijos medžiagoje / Article in peer-reviewed Lithuanian international conference proceedings (P1e)
Author(s)
| Author |
|---|
Koszewski, A. |
Title
Surface energy and frictional / adhesive properties of polymeric resist films
Part Of
BALTTRIB ' 2011 : proceedings of VI international scientific conference, Aleksandras Stulginskis University, Kaunas, Lithuania, 17-19 November 2011
Date Issued
| Date | Start Page | End Page |
|---|---|---|
2011 | 81 | 86 |
Publisher
Akademija, Kauno rajonas : Aleksandro Stulginskio universiteto Leidybos centras
Abstract (en)
The effect of plasma treatment on surface properties of resist films devoted for nanoimprint lithography (NIL) was studied. The Atomic Force Microscope was used to identify surface topography, pull-off force and lateral (friction) force of the resist film before and after plasma treatment with the presence of nitrogen and hydrogen gases. The wettability was studied to estimate surface energy of the films both with polar and dispersion components. The AFM-based microtribometer enabled to study the frictional behavior of the resist films. The results of these extended studies have shown that the used plasma functionalization is effective to modify dramatically the surface properties of the resist films.
Series/Report no.
Type of document
text::journal::journal article::research article
Language
Anglų / English (en)
Coverage Spatial
Lietuva / Lithuania (LT)
Conference
| Conference | ||||
|---|---|---|---|---|
2011-11-17 | 2011-11-19 | Akademija, Kauno r. | LT |
ISSN (of the container)
1822-8801
2424-5089
Access Rights
Atviroji prieiga / Open Access